Title :
Optimal control of ion beam dynamics
Author :
Viviani, G.L. ; Falco, M.
Author_Institution :
Varian Ion Implant Syst., Gloucester, MA, USA
Abstract :
Beam tuning is a problem in which an operating point of a state vector must be determined such that a pregiven objective is optimized. The most reliable approaches involve application of control consistent with the requisite physics of implantation. This paper outlines the salient features of reliable and repeatable algorithms dependent upon physical phenomena and then describes how these characteristics are applied to develop a commercial beam tuning product. Initial results are also described
Keywords :
beam handling techniques; integrated circuit manufacture; ion beams; ion implantation; optimal control; particle beam dynamics; process control; N-state memory device; beam tuning; implantation physics; ion beam dynamics; ion implantation; operating point; optimal control; reliable repeatable algorithms; state vector; Automatic control; Implants; Ion beams; Mathematical model; Mathematics; Optimal control; Physics; Robust control; Semiconductor device reliability; State-space methods;
Conference_Titel :
Ion Implantation Technology. Proceedings of the 11th International Conference on
Conference_Location :
Austin, TX
Print_ISBN :
0-7803-3289-X
DOI :
10.1109/IIT.1996.586208
