Title :
SRPL mapping of semiconductor laser wafers
Author :
Carver, G.E. ; Heebner, R.W. ; Levkoff, J.
Author_Institution :
AT&T Bell Labs., Princeton, NJ, USA
fDate :
31 Oct-3 Nov 1994
Abstract :
High bandwidth telecommunications depends on the efficient manufacture of semiconductor lasers. The quality of partially processed laser structures can be monitored at the wafer level by spatially resolved photoluminescence (SRPL), providing timely feedback to processing engineers
Keywords :
semiconductor lasers; efficient manufacture; high bandwidth telecommunications; partially processed laser structures; semiconductor laser wafers; spatially resolved photoluminescence mapping; wafer level; Bandwidth; Brightness; Fiber lasers; Microelectronics; Photoluminescence; Semiconductor device manufacture; Semiconductor lasers; Spatial resolution; Temperature; Testing;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1994. LEOS '94 Conference Proceedings. IEEE
Conference_Location :
Boston, MA
Print_ISBN :
0-7803-1470-0
DOI :
10.1109/LEOS.1994.586281
