Title :
Utilizing a distributed data collection system to perform predictive maintenance (PdM) and equipment reliability studies
Author :
Seltzer, James H. ; Hertle, James
Author_Institution :
White Oak Semicond., Sandston, VA, USA
Abstract :
The Diffusion Engineering Department at White Oak Semiconductor designed, installed, and implemented a computer-based Distributed Data Collection System (DDCS) to monitor and record various process equipment sensor variables that are typically not available via a Semiconductor Standard SECS/GEM interface. As these sensors and controllers become more intelligent, it is important to leverage their capabilities to perform predictive maintenance and reliability studies. Importance was also placed on being able to expand and adapt this system over time
Keywords :
computerised monitoring; data acquisition; distributed control; distributed processing; graphical user interfaces; integrated circuit manufacture; maintenance engineering; process control; process monitoring; production engineering computing; reliability; CVD furnace; Free-Topology FTT-10 LonWorks network; White Oak Semiconductor; computer-based human machine interface; controllers; distributed data collection system; equipment reliability; predictive maintenance; process equipment sensor variables; sensors; wafer processing; Computer interfaces; Distributed control; Fluid flow; Furnaces; Humans; Large Hadron Collider; Network topology; Predictive maintenance; Reliability engineering; Sensor systems;
Conference_Titel :
Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium on
Conference_Location :
Santa Clara, CA
Print_ISBN :
0-7803-5403-6
DOI :
10.1109/ISSM.1999.808765
