Utilizing a distributed data collection system to perform predictive maintenance (PdM) and equipment reliability studies

Author

Seltzer, James H. ; Hertle, James

Author_Institution

White Oak Semicond., Sandston, VA, USA

fYear

1999

fDate

1999

Firstpage

175

Lastpage

178

Abstract

The Diffusion Engineering Department at White Oak Semiconductor designed, installed, and implemented a computer-based Distributed Data Collection System (DDCS) to monitor and record various process equipment sensor variables that are typically not available via a Semiconductor Standard SECS/GEM interface. As these sensors and controllers become more intelligent, it is important to leverage their capabilities to perform predictive maintenance and reliability studies. Importance was also placed on being able to expand and adapt this system over time

Keywords

computerised monitoring; data acquisition; distributed control; distributed processing; graphical user interfaces; integrated circuit manufacture; maintenance engineering; process control; process monitoring; production engineering computing; reliability; CVD furnace; Free-Topology FTT-10 LonWorks network; White Oak Semiconductor; computer-based human machine interface; controllers; distributed data collection system; equipment reliability; predictive maintenance; process equipment sensor variables; sensors; wafer processing; Computer interfaces; Distributed control; Fluid flow; Furnaces; Humans; Large Hadron Collider; Network topology; Predictive maintenance; Reliability engineering; Sensor systems;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium on

Conference_Location

Santa Clara, CA

ISSN

1523-553X

Print_ISBN

0-7803-5403-6

Type

conf

DOI

10.1109/ISSM.1999.808765

Filename

808765