• DocumentCode
    348115
  • Title

    A new technique for treating fluorine wastewater to reduce sludge and running costs

  • Author

    Toyoda, Arata ; Taira, Tsutomu

  • Author_Institution
    NEC Corp., Sagamihara, Japan
  • fYear
    1999
  • fDate
    1999
  • Firstpage
    271
  • Lastpage
    274
  • Abstract
    This technique utilizes a small amount of Al(OH)3 not only as an aggregator for CaF2 but also as an effective fluorine adsorbent. The Al(OH)3 is used repeatedly through an Al(OH)3 reclamation process. This technique can effectively treat the concentrated fluorine wastewater and eliminate the high-level treatment step. We constructed a practical treatment system simply by modifying part of an existing conventional system. This new treatment system reduced both the total sludge and running costs to about one tenth those of a conventional treatment system
  • Keywords
    electronics industry; environmental factors; integrated circuit economics; waste disposal; water treatment; Al(OH)3; F; aggregator; reclamation process; running costs; semiconductor industry; sludge reduction; treatment system; wastewater treatment; Artificial intelligence; Costs; Industrial waste; National electric code; Sediments; Sludge treatment; Wastewater treatment;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium on
  • Conference_Location
    Santa Clara, CA
  • ISSN
    1523-553X
  • Print_ISBN
    0-7803-5403-6
  • Type

    conf

  • DOI
    10.1109/ISSM.1999.808788
  • Filename
    808788