DocumentCode
348115
Title
A new technique for treating fluorine wastewater to reduce sludge and running costs
Author
Toyoda, Arata ; Taira, Tsutomu
Author_Institution
NEC Corp., Sagamihara, Japan
fYear
1999
fDate
1999
Firstpage
271
Lastpage
274
Abstract
This technique utilizes a small amount of Al(OH)3 not only as an aggregator for CaF2 but also as an effective fluorine adsorbent. The Al(OH)3 is used repeatedly through an Al(OH)3 reclamation process. This technique can effectively treat the concentrated fluorine wastewater and eliminate the high-level treatment step. We constructed a practical treatment system simply by modifying part of an existing conventional system. This new treatment system reduced both the total sludge and running costs to about one tenth those of a conventional treatment system
Keywords
electronics industry; environmental factors; integrated circuit economics; waste disposal; water treatment; Al(OH)3; F; aggregator; reclamation process; running costs; semiconductor industry; sludge reduction; treatment system; wastewater treatment; Artificial intelligence; Costs; Industrial waste; National electric code; Sediments; Sludge treatment; Wastewater treatment;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium on
Conference_Location
Santa Clara, CA
ISSN
1523-553X
Print_ISBN
0-7803-5403-6
Type
conf
DOI
10.1109/ISSM.1999.808788
Filename
808788
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