DocumentCode
3481170
Title
Performance and reliability study of Pd-coated copper wire bonding on ENEPIG substrate
Author
Lulu Shi ; Qian Wang ; Yu Chen ; Lin Tan ; Jian Cai ; Xin Gu ; Shuidi Wang ; Jingwei Li ; Yang Hu
Author_Institution
Inst. of Microelectron., Tsinghua Univ., Beijing, China
fYear
2013
fDate
11-14 Aug. 2013
Firstpage
1014
Lastpage
1018
Abstract
Pd-coated copper wire bonding is getting more practical applications in electronic packaging because of advantages, such as ease of use, better bonding performance and reliability. ENEPIG (Electroless Ni Electroless Pd Immersion Au) is a prevalent surface finish technique that can realize more flexible substrate design, increase wire density and hence achieve device miniaturization. Study had been focused on the evaluation of bonding performance and reliability of Pd-coated copper wire bonding on ENEPIG substrate in this paper. Design of Experiment (DOE) had been performed to investigate effects of bonding parameters such as USG current, friction amplitude, friction frequency and force on shear strength and yield. The optimized parameter set was determined after comparison and analysis. Among four bonding parameters, friction amplitude showed more significant impact on bonding quality. High Temperature Storage (HTS) test had been carried out to inspect reliability of Pd-coated copper wire bonding on ENEPIG substrate. After thermal aging at 175°C for 128 hours, the Cu-Au interface showed excellent bonding performance.
Keywords
ageing; copper alloys; design of experiments; electronics packaging; gold alloys; lead bonding; nickel alloys; palladium alloys; reliability; ENEPIG substrate; Ni-Pd-Au; Pd-Cu; USG current; bonding parameters; bonding quality; design of experiment; device miniaturization; electroless nickel electroless palladium immersion gold; electronic packaging; flexible substrate design; friction amplitude; friction frequency; high temperature storage test; shear strength; surface finish technique; temperature 175 C; thermal aging; time 128 hour; wire bonding performance; wire bonding reliability; Bonding; Copper; Friction; Gold; Reliability; Substrates; Wires; Bonding Strength; ENEPIG; Pd-coated Copper Wire; Reliability; Yield;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Packaging Technology (ICEPT), 2013 14th International Conference on
Conference_Location
Dalian
Type
conf
DOI
10.1109/ICEPT.2013.6756631
Filename
6756631
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