Title :
Optimization on the synthesis of large-area single-crystal graphene domains by chemical vapor deposition on copper foils
Author :
Chen Liang ; Wenrong Wang ; Tie Li ; Yuelin Wang
Author_Institution :
State Key Labs. of Transducer Technol., Shanghai Inst. of Microsyst. & Inf. Technol., Shanghai, China
fDate :
Aug. 29 2012-Sept. 1 2012
Abstract :
In this paper, a traditional chemical vapor deposition method for synthesis of single-crystal graphene domains on copper foils was optimized by modulating the growth parameters. This provided us a low-cost and high-yield method for large-area single-crystal graphene domain growth. By this way, single-crystal graphene domains larger than 10μm were synthesized with a gas flow of 1000sccm argon, 40sccm hydrogen and 1.5sccm low-concentration methane for 15min after 3h pre-annealing. The morphologies of as-synthesized samples were characterized by Raman spectrum, optical microscope and scanning electron microscope. The result showed that the 10μm graphene domains were monolayer single crystals.
Keywords :
Raman spectra; annealing; chemical vapour deposition; copper; foils; graphene; monolayers; optical microscopy; scanning electron microscopy; C; Cu; Raman spectrum; annealing; chemical vapor deposition; copper foil optimization; gas flow; growth parameter modulation; high-yield method; large-area single-crystal graphene domain synthesis; low-concentration methane; low-cost method; monolayer single crystals; morphological property; optical microscopy; scanning electron microscopy; Argon; Copper; Graphene; Hydrogen; Optical microscopy; Scanning electron microscopy; CVD; Raman spectrum; single-crystal graphene domains;
Conference_Titel :
Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2012 International Conference on
Conference_Location :
Shaanxi
Print_ISBN :
978-1-4673-4588-0
Electronic_ISBN :
978-1-4673-4589-7
DOI :
10.1109/3M-NANO.2012.6472974
