Title :
The onset of the high level of injection in MOS structures
Author :
Rusu, A. ; Dobrescu, D. ; Anghel, C.
Author_Institution :
Fac. of Electron. & Telecommun., Politehnica Univ. of Bucharest, Romania
Abstract :
The dependence of the inversion charge on the gate voltage in MOS structures has the same behaviour like the diffusion current versus the applied voltage in a pn doped junction. As a similarity, the terms “low level” and “high-level” of injection are extended over the MOS operation. The paper determinates the surface potential, φC, that separates the two regimes and demonstrates that its values are greater than the surface potential 2φB with 111...132 m V, for the usual doping concentration of the substrate. These results permit to use the low-level of injection model in MOS structures even in strong inversion condition
Keywords :
MIS structures; charge injection; inversion layers; surface potential; MOS structure; charge injection; inversion layer; substrate doping concentration; surface potential; Dielectric constant; Doping; Electrons; Equations; Knee; MOS capacitors; MOSFETs; Semiconductor process modeling; Silicon; Voltage;
Conference_Titel :
Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-5139-8
DOI :
10.1109/SMICND.1999.810451