Frequency characteristics of calculable thin-film multijunction thermal converters above 1 MHz

Thin film multijunction thermal converters (MJTC) have been developed and their frequency characteristics above 1 MHz have been calculated. Practical thin film MJTCs are separately produced on a high thermal conductivity AlN chip for the heater, mounted on a polyimide film for thermocouples. On one of the plus sides for our MJTCs, by sputtering heater compounds on an AlN substrate acting as a heatsink, the nominal current increases as compared with traditional single-junction thermal converters. The nominal voltage of a 50 Ω heater resistor is about 2.5 V. This paper describes the frequency characteristics of our MJTCs to be used as a standard from 1 MHz up to 50 MHz.