Title :
The influence of the substrate temperature during the pulse laser deposition on the YBCO thin films revealed by AFM
Author :
Rau, Svetlana ; Nastase, Nicoleta ; Trtik, V. ; Varela, M. ; Sanchez, F. ; Nastase, S.
Author_Institution :
Nat. Inst. for Res. & Dev. for Microtechnol., Bucharest, Romania
Abstract :
The results obtained by atomic force microscopy (AFM) characterisation of high temperature superconducting (HTS) YBCO thin films, pulse laser deposited (PLD) on a heated LaAlO3 substrate, are presented. An KrF excimer laser beam was used for the thin film PLD (ablation) in reactive vacuum. The analysed thin films were grown on the same substrate which, because of the glue, was at different thermal conditions. It was found that the film with a slightly lower substrate temperature has not completely switched to the orthorhombic structure and the electrical characteristics of the two thin films are significantly different
Keywords :
atomic force microscopy; barium compounds; high-temperature superconductors; pulsed laser deposition; superconducting thin films; yttrium compounds; AFM; KrF excimer laser beam; LaAlO3; YBa2Cu3O7; ablation; heated LaAlO3 substrate; high temperature superconductors; pulsed laser deposition; reactive vacuum; substrate temperature; thin films; Atomic beams; Atomic force microscopy; Atomic layer deposition; High temperature superconductors; Laser ablation; Optical pulses; Pulsed laser deposition; Substrates; Superconducting thin films; Yttrium barium copper oxide;
Conference_Titel :
Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-5139-8
DOI :
10.1109/SMICND.1999.810502
