Title :
Probe-anode as a characterization tool for field emission arrays
Author :
Nicolaescu, D. ; Filip, V. ; Itoh, J. ; Kleps, I.
Author_Institution :
Inst. of Microtechnol., Bucharest, Romania
Abstract :
A method of characterization for arrays of vertical field emitters is presented, which makes use of an anode of micron-sized dimensions. Modeling results show that the probe-anode emission current varies in a similar way as for large dimension anodes. Practical rules are derived for correct interpretation of the experimental data
Keywords :
anodes; electron field emission; probes; vacuum microelectronics; emission current; field emission array; probe anode; Anodes; Atomic force microscopy; Current density; Field emitter arrays; Flat panel displays; Manufacturing; Micromachining; Physics; Scanning electron microscopy; Silicon;
Conference_Titel :
Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-5139-8
DOI :
10.1109/SMICND.1999.810509
