Title :
Microwave straight edge resonator (SER) on silicon membrane
Author :
Sajin, George ; Matei, Elena ; Dragoman, Mircea
Author_Institution :
Nat. Inst. of Res. & Dev. for Microtechnol., Bucharest, Romania
Abstract :
The work presents modelling of a microwave straight edge resonator (SER) designed on a silicon membrane. The aim of this approach is to obtain a miniaturised device, integrable in a planar microwave circuit. The design and S parameters measurements of MSW transducers on silicon membrane are presented. Modelling a microwave SER having a silicon membrane as substrate demonstrates the possibility to realise such frequency swept microwave devices. Using silicon membranes to support these devices offers the advantage of miniaturisation, with important openings toward microwave circuit integration on semiconductor substrate
Keywords :
MMIC; S-parameters; cavity resonators; elemental semiconductors; magnetic microwave devices; magnetostatic wave devices; membranes; microstrip resonators; silicon; MSW transducers; S parameters; Si; design; frequency swept microwave devices; microwave circuit integration; microwave straight edge resonator; miniaturised device; modelling; planar microwave circuit; semiconductor substrate; silicon membrane; Biomembranes; Detectors; Ferrites; Magnetostatic waves; Microstrip; Microwave devices; Microwave integrated circuits; Silicon; Substrates; Transducers;
Conference_Titel :
Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-5139-8
DOI :
10.1109/SMICND.1999.810517
