Title :
Fabrication of mass sensitive piezoresistive cantilever structure for biochemical detection
Author :
Firdaus, S.M. ; Omar, Husna ; Azid, Ishak Abd
Author_Institution :
Fac. of Mech. Eng., Univ. Technol. MARA (UiTM), Permatang Pauh, Malaysia
Abstract :
This paper reports a mechanical micro-structure MEMS (Micro-Electricomechanical System) based sensor fabrication using CMOS platform for biochemical detection. The structure is monolithically integrated with the detection circuit/ readout circuit. Silicon dioxide layer is implemented in the current MEMS structure as an absorption layer for bio targets by CMOS process tools. Result shows that the fabricated piezoresistive cantilever MEMS have linear relation output voltage respond with the different weight of DNA applied.
Keywords :
CMOS integrated circuits; DNA; biosensors; cantilevers; chemical sensors; microsensors; piezoresistive devices; silicon compounds; CMOS platform; DNA; SiO2; biochemical detection; detection circuit; linear relation output voltage; mass sensitive piezoresistive cantilever structure; mechanical microstructure MEMS; micro-electromechanical system; readout circuit; sensor fabrication; silicon dioxide layer; Bridge circuits; DNA; Educational institutions; Fabrication; Micromechanical devices; Piezoresistance; Stress; Biosensor; MEMS; Micro structure; Piezoresistive;
Conference_Titel :
Humanities, Science and Engineering (CHUSER), 2011 IEEE Colloquium on
Conference_Location :
Penang
Print_ISBN :
978-1-4673-0021-6
DOI :
10.1109/CHUSER.2011.6163788
