DocumentCode :
3482581
Title :
Simulation model and it´s sharp tuning for SiO2 thin film transmission line
Author :
Wenbin Chen ; Xianmin Huang ; Xiaosong Ma ; Miao Cai ; Daoguo Yang
Author_Institution :
Guilin Univ. of Electron. Technol., Guilin, China
fYear :
2013
fDate :
11-14 Aug. 2013
Firstpage :
1284
Lastpage :
1287
Abstract :
This paper aims to build an simulation model for SiO2 thin film coplanar waveguide transmission line. After sharp tuning the model´s parameters, an optimization simulation model has been found. The S-parameters will be presented through wafer-probe measurements and EM simulation (electromagnetic simulation). In order to get the better fit between measurements data and simulations, parameters such as the conduct width are tuned. In view of the results, the most appropriate parameters will be found and an optimization simulation model of the test structure will be presented. The optimization simulation model has been defined as CPW transmission line with a known SiO2 layer which using ADS (Advanced Design System 2012.08) simulations and two ports S-parameters measurements up to 6 GHz. The result proves that this model is suitable for characterization of the new dielectric materials by experimental validation.
Keywords :
coplanar transmission lines; coplanar waveguides; optimisation; thin film devices; tuning; ADS; CPW transmission line; EM simulation; S-parameters measurements; SiO2; advanced design system; dielectric materials; electromagnetic simulation; optimization simulation model; sharp tuning; simulation model; thin film coplanar waveguide transmission line; thin film transmission line; wafer-probe measurements; Data models; Gold; Market research; Scattering parameters; Semiconductor device modeling; Transmission line measurements; Tuning; EM-simulation; S-parameters; SiO2; sharp tuning; thin film;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronic Packaging Technology (ICEPT), 2013 14th International Conference on
Conference_Location :
Dalian
Type :
conf
DOI :
10.1109/ICEPT.2013.6756692
Filename :
6756692
Link To Document :
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