A beam line test stand for automation and ion source developments

Author

Al-Bayati, Amir ; Foad, Majeed ; Marin, Tony ; Young, Paul ; Macklin, Ron ; Connolly, Noreen

Author_Institution

Implant Div., Appl. Mater., Austin, TX, USA

fYear

1996

fDate

16-21 Jun 1996

Firstpage

390

Lastpage

393

Abstract

A highly automated test stand for the development of advanced ion sources is described. The main goal is to develop fully automated ion sources which operate with long lifetime, high beam current stability, and wide beam current dynamic range. The source chamber is designed to accommodate Bernas, Freeman and other type ion sources. A microprocessor-based system is used for studies of improved software codes for control of ion sources and auto-tuning. The quality of the extracted beam and the extraction optics is studied using a current density beam profiler, an emittance monitor, and ion beam simulation. In this paper, we describe the layout and hardware of the test stand, and discuss the requirements and criteria used in the design and development of the ion source and beam line. Preliminary data of Langmuir probe measurements obtained from the Bernas and Freeman source are presented

Keywords

Langmuir probes; automatic test equipment; beam handling techniques; current density; ion beams; ion sources; microcomputer applications; particle beam diagnostics; particle beam dynamics; particle beam extraction; particle beam stability; physical instrumentation control; Bernas ion source; Freeman ion source; Langmuir probe measurements; advanced ion sources; auto-tuning; automated test stand; beam line test stand; current density beam profiler; emittance monitor; extracted beam quality; extraction optics; fully automated ion sources; high beam current stability; ion beam simulation; ion source control; long lifetime; microprocessor-based system; software codes; source chamber design; source plasma characterization; wide beam current dynamic range; Automatic control; Automatic testing; Automation; Control systems; Data mining; Dynamic range; Ion beams; Ion sources; Particle beam optics; Stability;

fLanguage

English

Publisher

ieee

Conference_Titel

Ion Implantation Technology. Proceedings of the 11th International Conference on

Conference_Location

Austin, TX

Print_ISBN

0-7803-3289-X

Type

conf

DOI

10.1109/IIT.1996.586359

Filename

586359