Title :
Corrosion reliability study of indium tin oxide (ITO) for chip-on-glass (COG)
Author :
Leung, Wing-Sze ; Chan, Yan-Cheong ; Lui, Siu-Ming
Author_Institution :
Dept. of Electron. Eng., City Univ. of Hong Kong, Hong Kong
Abstract :
To enhance the understanding of possible root cause and the failure mechanism that would lead to the ITO corrosion, the paper concentrates on discussing the effect of scratching on both the glass and ITO surface. X-ray photoelectron spectroscopy (XPS) is utilised to analyze the sample surface and the chemical state of the degraded part of samples. Results show that when ITO is subjected to harsh environment together with the presence of the electric field, scratching acts as a tunnel for easy permeation of moisture and contaminants. The presence of Cl- reacts with moisture and forms HCl that etch the ITO. Once corroded, colouration and structural change of the ITO tracks is observed.
Keywords :
X-ray photoelectron spectra; corrosion; indium compounds; semiconductor materials; surface structure; ITO; JkSiO2; X-ray photoelectron spectroscopy; XPS; chemical state; chip-on-glass; colouration; corrosion reliability; failure mechanism; glass surface; indium tin oxide; scratching; structural change; Chemical analysis; Corrosion; Degradation; Etching; Failure analysis; Glass; Indium tin oxide; Moisture; Spectroscopy; Surface contamination;
Conference_Titel :
Microwave Conference, 2008. APMC 2008. Asia-Pacific
Conference_Location :
Macau
Print_ISBN :
978-1-4244-2641-6
Electronic_ISBN :
978-1-4244-2642-3
DOI :
10.1109/APMC.2008.4958130