Title :
Measurement of spatial distribution of absolute CF/sub x/ radical densities in a plasma reactor using infrared diode laser absorption spectroscopy and laser-induced fluorescence
Author :
Nakamura, M. ; Nakayama, H. ; Ito, Minora ; Hori, M. ; Kono, A. ; Goto, T. ; Ishii, N.
Author_Institution :
Sch. of Eng., Nagoya Univ., Japan
fDate :
Aug. 30 1999-Sept. 3 1999
Abstract :
Combining a single-path infrared laser absorption spectroscopy with a LIF technique, we have successfully obtained radial distributions of absolute CF and CF/sub 2/ radical densities in a ECR-C/sub 4/F/sub 8/ plasma reactor. This method enabled us to measure the behaviors of radical density distribution with high reliability over the various kinds of plasma conditions.
Keywords :
fluorescence; infrared spectra; organic compounds; plasma density; plasma diagnostics; CF; ECR-tetrafluorobutene plasma reactor; absolute CF/sub x/ radical densities; difluoromethylene; infrared diode laser absorption spectroscopy; laser-induced fluorescence; plasma reactor; radical density distribution; spatial distribution; Density measurement; Electromagnetic wave absorption; Etching; Fluorescence; Inductors; Infrared spectra; Laser beams; Plasma applications; Plasma density; Plasma measurements;
Conference_Titel :
Lasers and Electro-Optics, 1999. CLEO/Pacific Rim '99. The Pacific Rim Conference on
Conference_Location :
Seoul, South Korea
Print_ISBN :
0-7803-5661-6
DOI :
10.1109/CLEOPR.1999.811464
