Experimental design for equipment qualification and matching

Process qualifications are required as new equipment is added to a fab to ensure good product quality. For Ion Implanters, dose-matching of machines is a necessary first step in this procedure. Split-lot qualifications are also commonly run prior to releasing a new machine to production. The design of these experiments is crucial to efficient qualification. The use of a fractional factorial design ensures that a lot is split differently at each implant layer. Statistical analysis can independently check each implant for significant differences in electrical parameters. These methods have many advantages over more traditional approaches