Comparisons of UT-MARLOWE predictions of implant-induced damage with experimentally measured amorphous layer thicknesses

Amorphous layer thicknesses have been obtained for As, BF₂ and B ion implants using the following experimental techniques: RBS, differential reflectometry, SEM and XTEM. Good agreement is generally found between the amorphous layer thickness measurements. Amorphous layer thickness predictions are presented based on the current version (3.1) of UT-MARLOWE with the simplified physically based damage model. The predictions for the amorphous layer thicknesses are in good agreement with the experimental data for As and BF₂, but are larger than the measured amorphous layer thicknesses for B implants. The difference in the predictive ability for As and BF₂ relative to B is explained in terms of the distributions of damage produced during implantation. The measurement results, predictions, and the differences found are discussed in this paper