A low insertion loss 60 GHz band pass filter using wafer transfer

Author

Luo, B. ; Guo, Y.X. ; Wang, J.P. ; Liao, E.B.

Author_Institution

Inst. for Infocomm Res., Singapore

fYear

2008

fDate

16-20 Dec. 2008

Firstpage

1

Lastpage

4

Abstract

In this paper, a low insertion loss band pass filter using WTT for 60 GHz band applications is presented. The filter geometry was pre-fabricated on a Si wafer with 3-um-thick Cu and 1KA SiN dielectric layer. Then this filter pattern was transferred onto the substrate Rogers RT/Duroid 5880. In this design, by replacing the silicon substrate with the Rogers RT/Duroid 5880 base, a low insertion loss 60 GHz band pass filter has been achieved. The measurement results show this filter has a 3dB band width of 7.5 GHz and insertion loss is 1.8 dB. Measured results are consistency with the HFSS simulation results.

Keywords

band-pass filters; millimetre wave filters; Rogers RT-Duroid 5880; band pass filter; bandwidth 7.5 GHz; filter pattern; frequency 60 GHz; insertion loss; silicon substrate; wafer transfer; Band pass filters; Coplanar waveguides; Dielectric loss measurement; Dielectric measurements; Dielectric substrates; Frequency; Insertion loss; Loss measurement; Microwave filters; Millimeter wave circuits;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2008. APMC 2008. Asia-Pacific

Conference_Location

Macau

Print_ISBN

978-1-4244-2641-6

Electronic_ISBN

978-1-4244-2642-3

Type

conf

DOI

10.1109/APMC.2008.4958180

Filename

4958180