Laser deposition of CN/sub x/ films combined with RF and hollow cathode discharges

Author

Jelinek, M. ; Lancok, J. ; Trchova, M. ; Vorlicek, V. ; Zemek, J. ; Simeckova, M.

Author_Institution

Inst. of Phys., Czechoslovak Acad. of Sci., Prague, Czech Republic

Volume

1

fYear

1999

fDate

Aug. 30 1999-Sept. 3 1999

Firstpage

84

Abstract

We have used RF nitrogen plasma-assisted laser deposition. Laser ablates the graphite target while simultaneously a radiofrequency (RF) nitrogen discharge is sustained by two planar electrodes situated parallel to the plasma plume and thus ensuring additional excitation of N/sub 2/ molecules. The influence of a hollow cathode (HC) discharge was also studied. Films were characterized by wavelength dispersive X-ray analysis, SEM, XRD, XPS, FTIR spectroscopy, Raman scattering, and by scratch and microhardness testers. Nearly stoichiometric N/C ratio was measured in deposited films for PLD combined with RF+HC discharges and also for PLD combined with RF only.

Keywords

Fourier transform spectra; Raman spectra; X-ray chemical analysis; X-ray diffraction; X-ray photoelectron spectra; carbon compounds; glow discharges; high-frequency discharges; infrared spectra; microhardness; plasma deposition; pulsed laser deposition; scanning electron microscopy; stoichiometry; CN; CN/sub x/ films; FTIR spectroscopy; N/sub 2/; RF N/sub 2/ discharge; RF N/sub 2/ plasma-assisted laser deposition; Raman scattering; SEM; XPS; XRD; graphite target; hollow cathode discharges; microhardness; nearly stoichiometric N/C ratio; planar electrodes; plasma plume; scratch tests; wavelength dispersive X-ray analysis; Cathodes; Dispersion; Electrodes; Laser excitation; Nitrogen; Plasma waves; Plasma x-ray sources; Radio frequency; Raman scattering; Spectroscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 1999. CLEO/Pacific Rim '99. The Pacific Rim Conference on

Conference_Location

Seoul, South Korea

Print_ISBN

0-7803-5661-6

Type

conf

DOI

10.1109/CLEOPR.1999.811635

Filename

811635