DocumentCode :
3486931
Title :
A novel trench planarization technique using polysilicon refill, polysilicon oxidation, and oxide etchback
Author :
Shenai, K. ; Hennessy, W. ; Ghezzo, M.
Author_Institution :
General Electric Corp. Res. & Dev., Schenectady, NY, USA
fYear :
1991
fDate :
22-24 Apr 1991
Firstpage :
198
Abstract :
Summary form only given. A trench planarization technique is reported which uses polysilicon refill and sequential polysilicon oxidation and oxide etchback processes. Silicon trenches with varying trench depths (1-10 μm) and trench aspect ratios were successfully planarized using this technique. The process uniformity across 4 in. dia. silicon wafers was excellent with MOS gate yields in excess of 95%. Trench capacitors were fabricated and tested for MOS gate interface characteristics and reliability. Trench power MOSFETs were fabricated using a conventional two-step RIE (reactive ion etching) process as well as the proposed technique. It was found that the proposed technique resulted in significant improvements in gate yield and process uniformity, and is easily adaptable in a manufacturing environment for fabricating high-density trench-based active devices, isolation structures, and interconnections
Keywords :
insulated gate field effect transistors; oxidation; power transistors; sputter etching; 1 to 10 micron; MOS gate yields; RIE; gate interface characteristics; gate yield; interconnections; isolation structures; oxide etchback; polysilicon oxidation; polysilicon refill; power MOSFETs; process uniformity; reliability; trench aspect ratios; trench depths; trench planarization technique; Etching; Isolation technology; MOS capacitors; Manufacturing processes; Oxidation; Planarization; Plasma applications; Plasma devices; Silicon; Testing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Power Semiconductor Devices and ICs, 1991. ISPSD '91., Proceedings of the 3rd International Symposium on
Conference_Location :
Baltimore, MD
ISSN :
1063-6854
Print_ISBN :
0-7803-0009-2
Type :
conf
DOI :
10.1109/ISPSD.1991.146098
Filename :
146098
Link To Document :
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