DocumentCode
3487351
Title
Fabrication of the main electrodes of the NMIA-BIPM calculable capacitor
Author
Small, G.W.
Author_Institution
Nat. Meas. Inst., Lindfield, NSW, Australia
fYear
2010
fDate
13-18 June 2010
Firstpage
543
Lastpage
544
Abstract
The design of the NMIA-BIPM calculable cross capacitor includes the requirement that the main electrodes be geometrically true cylinders to within 100 nm over all but the last 50 mm at each end of their length. After much experimentation, techniques have been developed that result in the fabrication of electrodes that comfortably meet this requirement.
Keywords
capacitors; electrodes; NMIA-BIPM calculable cross capacitor design; electrode fabrication; size 100 nm; size 50 nm; Capacitors; Electrodes; Fabrication;
fLanguage
English
Publisher
ieee
Conference_Titel
Precision Electromagnetic Measurements (CPEM), 2010 Conference on
Conference_Location
Daejeon
Print_ISBN
978-1-4244-6795-2
Type
conf
DOI
10.1109/CPEM.2010.5544846
Filename
5544846
Link To Document