• DocumentCode
    3487351
  • Title

    Fabrication of the main electrodes of the NMIA-BIPM calculable capacitor

  • Author

    Small, G.W.

  • Author_Institution
    Nat. Meas. Inst., Lindfield, NSW, Australia
  • fYear
    2010
  • fDate
    13-18 June 2010
  • Firstpage
    543
  • Lastpage
    544
  • Abstract
    The design of the NMIA-BIPM calculable cross capacitor includes the requirement that the main electrodes be geometrically true cylinders to within 100 nm over all but the last 50 mm at each end of their length. After much experimentation, techniques have been developed that result in the fabrication of electrodes that comfortably meet this requirement.
  • Keywords
    capacitors; electrodes; NMIA-BIPM calculable cross capacitor design; electrode fabrication; size 100 nm; size 50 nm; Capacitors; Electrodes; Fabrication;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Precision Electromagnetic Measurements (CPEM), 2010 Conference on
  • Conference_Location
    Daejeon
  • Print_ISBN
    978-1-4244-6795-2
  • Type

    conf

  • DOI
    10.1109/CPEM.2010.5544846
  • Filename
    5544846