Title :
Exact basic geometric operations on arbitrary angle polygons using only fixed size integer coordinates
Author :
Lvov, Alexey ; Finkler, Ulrich
Author_Institution :
T.J. Watson Res. Center, IBM, Yorktown Heights, NY
Abstract :
As the semiconductor technology is scaling down to nanometer regime, accurate layout analysis requires operations with simulated contours of VLSI layouts which are non-rectilinear.
Keywords :
VLSI; geometry; integrated circuit layout; VLSI layouts; arbitrary angle polygons; exact basic geometric operations; fixed size integer coordinates; layout analysis; semiconductor technology; Analytical models; Arithmetic; Geometry; Kernel; Manufacturing processes; Optical distortion; Performance analysis; Roundoff errors; Shape; Very large scale integration;
Conference_Titel :
Computer-Aided Design, 2008. ICCAD 2008. IEEE/ACM International Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4244-2819-9
Electronic_ISBN :
1092-3152
DOI :
10.1109/ICCAD.2008.4681620
