• DocumentCode
    3488140
  • Title

    Rapid corona charging and stability of positive charge stored in SiO2/Si3N4 electrets

  • Author

    Leonov, V. ; Fiorini, P. ; Van Hoof, C.

  • Author_Institution
    IMEC, Leuven, Belgium
  • fYear
    2005
  • fDate
    11-14 Sept. 2005
  • Firstpage
    352
  • Lastpage
    355
  • Abstract
    A charging procedure combined with a HMDS- and a heat-treatment of the SiO2/Si3N4 electret on a silicon carrier is developed. The retention of a positive charge and its re-trapping is investigated. The optimized process parameters provide about 100-year lifetime of the electret. No spatial charge re-trapping is observed at a characteristic length of 0.1 mm after processing of the electret. A set of experiments is carried out to characterize the properties of the electret at temperatures up to 450°C, which is important for its packaging or use at elevated temperatures.
  • Keywords
    corona; dielectric thin films; electrets; heat treatment; organic compounds; silicon compounds; 450 C; SiO2-Si3N4; SiO2-Si3N4 electret stability; SiO2-Si3N4 films; heat-treatment; hexamethyldisilazane; positive charge retention; rapid corona charging procedure; silicon carrier; spatial charge retrapping; Breakdown voltage; Corona; Electrets; Power generation; Silicon; Stability; Temperature; Vibrations; Voltage control; Wind energy generation;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electrets, 2005. ISE-12. 2005 12th International Symposium on
  • Print_ISBN
    0-7803-9116-0
  • Type

    conf

  • DOI
    10.1109/ISE.2005.1612396
  • Filename
    1612396
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3488140