Title :
Optical signal distribution on silicon using a thin film photodetector array embedded in a multimode interference (MMI) coupler
Author :
Cho, Sang-Yeon ; Seo, Sang-Woo ; Jokerst, Nan Marie
Author_Institution :
Dept. of Electr. & Comput. Eng., Duke Univ., Durham, NC, USA
Abstract :
This paper reports upon the design, fabrication, and characterization of optical signal distribution in a planar lightwave format using 1 by 4 multimode interference (MMI) couplers and arrays of thin film metal-semiconductor-metal photodetectors (MSM PDs) embedded in the output waveguides of the MMI coupler for O/E conversion.
Keywords :
elemental semiconductors; metal-semiconductor-metal structures; optical arrays; optical couplers; optical information processing; optical interconnections; optical planar waveguides; photodetectors; silicon; MMI coupler; MSM PD; O/E conversion; Si; multimode interference coupler; optical signal distribution; planar lightwave format; thin film metal-semiconductor-metal photodetectors; thin film photodetector array; Interference; Optical arrays; Optical coupling; Optical design; Optical device fabrication; Optical films; Photodetectors; Semiconductor thin films; Signal design; Silicon;
Conference_Titel :
Biophotonics/Optical Interconnects and VLSI Photonics/WBM Microcavities, 2004 Digest of the LEOS Summer Topical Meetings
Print_ISBN :
0-7803-8306-0
DOI :
10.1109/LEOSST.2004.1338683
