Title :
Modeling of Resonator Cambers for Vacuum-Plasma Processing and Thin-Film Covering of Multilayered Planar Substrates
Author :
Davidovich, M.V. ; Yafarov, R.K.
Author_Institution :
Saratov State Univ.
Abstract :
The rectangular resonator chamber constructions have be proposed and investigated for vacuum-plasma processing and thin-film covering of multilayered planar substrates. The rectangular waveguide aperture and slot antennas have been considered to feed the chamber. The multiaperture, multislot with transverse slots, and single longitudinal slot antennas have been proposed
Keywords :
rectangular waveguides; resonators; slot antennas; multiaperture; multilayered planar substrates; multislot; rectangular resonator chamber; rectangular waveguide aperture; slot antennas; thin film covering; transverse slots; vacuum plasma processing; Antenna feeds; Aperture antennas; Frequency; Indium tin oxide; Rectangular waveguides; Slot antennas; Substrates; Transistors;
Conference_Titel :
Actual Problems of Electron Devices Engineering, International Conference on
Conference_Location :
Saratov
Print_ISBN :
1-4244-0247-6
Electronic_ISBN :
1-4244-0247-6
DOI :
10.1109/APEDE.2006.307410
