• DocumentCode
    3488964
  • Title

    Modeling of Resonator Cambers for Vacuum-Plasma Processing and Thin-Film Covering of Multilayered Planar Substrates

  • Author

    Davidovich, M.V. ; Yafarov, R.K.

  • Author_Institution
    Saratov State Univ.
  • fYear
    2006
  • fDate
    20-21 Sept. 2006
  • Firstpage
    196
  • Lastpage
    201
  • Abstract
    The rectangular resonator chamber constructions have be proposed and investigated for vacuum-plasma processing and thin-film covering of multilayered planar substrates. The rectangular waveguide aperture and slot antennas have been considered to feed the chamber. The multiaperture, multislot with transverse slots, and single longitudinal slot antennas have been proposed
  • Keywords
    rectangular waveguides; resonators; slot antennas; multiaperture; multilayered planar substrates; multislot; rectangular resonator chamber; rectangular waveguide aperture; slot antennas; thin film covering; transverse slots; vacuum plasma processing; Antenna feeds; Aperture antennas; Frequency; Indium tin oxide; Rectangular waveguides; Slot antennas; Substrates; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Actual Problems of Electron Devices Engineering, International Conference on
  • Conference_Location
    Saratov
  • Print_ISBN
    1-4244-0247-6
  • Electronic_ISBN
    1-4244-0247-6
  • Type

    conf

  • DOI
    10.1109/APEDE.2006.307410
  • Filename
    4099624
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3488964