DocumentCode :
3489301
Title :
SIMOX 3-D sculpting of vertically-coupled microresonators in silicon
Author :
Koonath, Prakash ; Indukuri, Tejaswi ; Jalali, Bahram
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
fYear :
2004
fDate :
28-30 June 2004
Abstract :
In this paper we report the demonstration of vertically coupled microdisk resonator structures on SOI substrates, using the technique of SIMOX 3-D sculpting.
Keywords :
SIMOX; elemental semiconductors; integrated optoelectronics; micro-optics; microcavities; optical fabrication; optical resonators; silicon; silicon compounds; SIMOX 3-D sculpting; SOI substrates; SiO2-Si; silicon; vertically coupled microdisk resonator structures; vertically-coupled microresonators; Annealing; Coupling circuits; Etching; Integrated optics; Lithography; Optical devices; Optical resonators; Oxygen; Resonance; Silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Biophotonics/Optical Interconnects and VLSI Photonics/WBM Microcavities, 2004 Digest of the LEOS Summer Topical Meetings
ISSN :
1099-4742
Print_ISBN :
0-7803-8306-0
Type :
conf
DOI :
10.1109/LEOSST.2004.1338729
Filename :
1338729
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3489301
بازگشت