• DocumentCode
    3489301
  • Title

    SIMOX 3-D sculpting of vertically-coupled microresonators in silicon

  • Author

    Koonath, Prakash ; Indukuri, Tejaswi ; Jalali, Bahram

  • Author_Institution
    Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
  • fYear
    2004
  • fDate
    28-30 June 2004
  • Abstract
    In this paper we report the demonstration of vertically coupled microdisk resonator structures on SOI substrates, using the technique of SIMOX 3-D sculpting.
  • Keywords
    SIMOX; elemental semiconductors; integrated optoelectronics; micro-optics; microcavities; optical fabrication; optical resonators; silicon; silicon compounds; SIMOX 3-D sculpting; SOI substrates; SiO2-Si; silicon; vertically coupled microdisk resonator structures; vertically-coupled microresonators; Annealing; Coupling circuits; Etching; Integrated optics; Lithography; Optical devices; Optical resonators; Oxygen; Resonance; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Biophotonics/Optical Interconnects and VLSI Photonics/WBM Microcavities, 2004 Digest of the LEOS Summer Topical Meetings
  • ISSN
    1099-4742
  • Print_ISBN
    0-7803-8306-0
  • Type

    conf

  • DOI
    10.1109/LEOSST.2004.1338729
  • Filename
    1338729
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3489301