Title :
Investigation Model of Multipurpose Technological Device for Vacuum Plasma Treatment Thin Films Deposited on Band Substrate
Author :
Generalova, T.B. ; Yafarov, R.K.
Author_Institution :
Inst. of Radioeng. & Electron., Russian Acad. of Sci., Saratov
Abstract :
Designed, made and researched model of multipurpose technological device for vacuum plasma treatment thin films deposited on band substrate. Calculated and made antenna provided satisfactory agreement with chamber at three loads: 1) chamber without treatment details; 2) chamber with high absorption insulator; and 3) chamber with insulator covered metal
Keywords :
plasma deposition; thin films; vacuum deposition; band substrate; high absorption insulator; insulator covered metal; multipurpose technological device; thin films deposition; vacuum plasma treatment thin films; Absorption; Insulation; Loaded antennas; Metal-insulator structures; Plasma devices; Sputtering; Thin film devices; Vacuum technology;
Conference_Titel :
Actual Problems of Electron Devices Engineering, International Conference on
Conference_Location :
Saratov
Print_ISBN :
1-4244-0246-8
Electronic_ISBN :
1-4244-0247-6
DOI :
10.1109/APEDE.2006.307436
