Title :
A perturbation finite element method for modeling electrostatic MEMS without remeshing
Author :
Boutaayamou, Mohamed ; Sabariego, Ruth V. ; Dular, Patrick
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Univ. of Liege, Liege
Abstract :
This paper deals with the coupled electrostatic- mechanical analysis of electrostatically actuated MEMS. An iterative perturbation procedure in conjunction with the finite element method is used to solve the coupled problem without the need of remeshing the whole electric domain. The method offers the advantage of overcoming degenerated finite elements in the mesh of some electric regions where the deflection of the MEMS moving parts is critical. The actuation of such systems is achieved by applying either an electric voltage or a global charge.
Keywords :
electrostatics; finite element analysis; micromechanical devices; perturbation techniques; coupled electrostatic-mechanical analysis; electrostatic MEMS; electrostatically actuated; iterative perturbation procedure; perturbation finite element method; Conductors; Electrodes; Electrostatic analysis; Finite element methods; Geometry; Iterative methods; Mesh generation; Micromechanical devices; Microstructure; Voltage;
Conference_Titel :
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems, 2008. EuroSimE 2008. International Conference on
Conference_Location :
Freiburg im Breisgau
Print_ISBN :
978-1-4244-2127-5
Electronic_ISBN :
978-1-4244-2128-2
DOI :
10.1109/ESIME.2008.4525012
