A multi-domain piezoresistive pressure sensor design tool based on analytical models

In recent years the MEMS market has grown rapidly. In parallel, design methodologies have developed in order to fulfil increasing design requirements. A finite-element- method analysis plays a key role in today´s designer work. Even though, in case of some multi-domain systems such as micro pressure sensors, a FEM analysis is used at the beginning of the project, such an approach could be inefficient because even a simple multi-domain analysis could be very time consuming. Thus, in order to perform fast and reliable analysis which gives the designer an overview of sensor´s performance, an analytical model may be a solution. In this paper, a fast, dedicated tool for micromachined pressure sensor design based on analytical models is presented.