Title :
A derivatives-based method for parameterization of MEMS Reduced Order Models
Author :
Kolchuzhin, Vladimir ; Doetzel, Wolfram ; Mehner, Jan
Author_Institution :
Dept. of Microsyst. & Precision Eng., Chemnitz Univ. of Technol., Chemnitz
Abstract :
The paper demonstrates an advanced simulation methodology based on differentiation of the discretized Finite Element (FE) equations for parameterization of MEMS macromodels. The idea of the approach is to compute not only the governing system matrices but also high order derivatives (HOD) with regard to design parameters by means of Automatic Differentiation (AD). As result, Taylor vectors of the model response can be expanded in the vicinity of the initial position with regard to dimensional and physical parameters. The objective of this presentation is to demonstrate the viability of HOD methods to parameterization of the mode superposition based Reduced Order Models (ROM) of the coupled- physics domains.
Keywords :
differentiation; finite element analysis; matrix algebra; micromechanical devices; reduced order systems; MEMS macromodels; MEMS reduced order models; Taylor vectors; advanced simulation; automatic differentiation; coupled-physics domain; derivatives-based method; design parameters; discretized finite element equations; high order derivatives; model response; parameterization; system matrices; Capacitance; Capacitive sensors; Computational modeling; Conductors; Electrostatics; Equations; Micromechanical devices; Read only memory; Reduced order systems; Sampling methods;
Conference_Titel :
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems, 2008. EuroSimE 2008. International Conference on
Conference_Location :
Freiburg im Breisgau
Print_ISBN :
978-1-4244-2127-5
Electronic_ISBN :
978-1-4244-2128-2
DOI :
10.1109/ESIME.2008.4525024
