Title :
Optoelectronic microswitch on SOI based structure
Author :
Chouteau, S. ; Boussey, J. ; Cabon, B. ; Iliadis, A.
Author_Institution :
LEMO, ENSERG, Grenoble, France
Abstract :
Optical waveguiding in BESOI (Bond and Etch back Silicon On Insulator) structures is investigated as a command tool for microwave signal transmission in coplanar lines. This paper reports the formation and the propagation characteristics of an optoelectronic microwave microswitch
Keywords :
coplanar waveguides; integrated optoelectronics; optical switches; optical waveguide components; optical waveguides; semiconductor switches; silicon-on-insulator; BESOI; coplanar line; microwave signal transmission; optical waveguiding; optoelectronic microwave microswitch; propagation characteristics; Electromagnetic waveguides; Etching; Integrated optics; Microwave devices; Optical films; Optical materials; Optical propagation; Optical waveguides; Photoconducting materials; Silicon on insulator technology;
Conference_Titel :
SOI Conference, 1995. Proceedings., 1995 IEEE International
Conference_Location :
Tucson, AZ
Print_ISBN :
0-7803-2547-8
DOI :
10.1109/SOI.1995.526450
