Title :
Thermo-electro-mechanical V-shaped actuator design and simulations
Author :
Matmat, M. ; Al Ahmad, M. ; Escriba, C. ; Soulimane, S. ; Marty, A. ; Fourniols, J.-Y.
Author_Institution :
LAAS, Univ. de Toulouse, Toulouse
Abstract :
This work details the 3D finite element electro- thermo-mechanical simulation of a current driven V-shaped actuator. The latter consists of two suspended polysilicon arms in a V configuration. The interest of this structure is that it can provide an important linear displacement parallel to the substrate. Stationary and parametric simulations were performed using COMSOL 3.3 and the obtained results were validated experimentally. In addition, a first attempt to model the actuator´s ageing behaviour has been made using an empirical model.
Keywords :
finite element analysis; microactuators; thermomechanical treatment; 3D finite element electro-thermo-mechanical simulation; COMSOL 3.3; V-shaped actuator design; parametric simulation; stationary simulation; suspended polysilicon arms; Analytical models; Arm; Boundary conditions; Electrostatic actuators; Finite element methods; Temperature distribution; Thermal force; Thermoelectricity; Thermomechanical processes; Voltage;
Conference_Titel :
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems, 2008. EuroSimE 2008. International Conference on
Conference_Location :
Freiburg im Breisgau
Print_ISBN :
978-1-4244-2127-5
Electronic_ISBN :
978-1-4244-2128-2
DOI :
10.1109/ESIME.2008.4525031
