An approach for simulating magnetic microactuators

Micro electro-mechanical systems (MEMS) are fabricated by combining deposition and etching techniques in conjunction with photo lithography for patterning. Due to this complex fabrication approach it is nearly impossible to easily fabricate prototypes. As a result modeling and simulation techniques are applied in the design process for such devices. This paper pinpoints an approach for modeling and simulating an electromagnetic microactuator. Establishing analytical model allows coming up with a cursory design, while a finite element method (FEM) analysis allows furthering optimum design features.