DocumentCode :
3490356
Title :
A 149W recessed-gate AlGaN/GaN FP-FET
Author :
Okamoto, Y. ; Ando, Y. ; Hataya, K. ; Nakayama, T. ; Miyamoto, H. ; Inoue, T. ; Senda, M. ; Hirata, K. ; Kosaki, M. ; Shibata, N. ; Kuzuhara, M.
Author_Institution :
Syst. Devices Res. Labs., NEC Corp., Shiga, Japan
Volume :
3
fYear :
2004
fDate :
6-11 June 2004
Firstpage :
1351
Abstract :
A recessed-gate AlGaN/GaN field-modulating plate (FP) FET was successfully fabricated on a SiC substrate. By employing recessed-gate structure for an FP-FET, the transconductance (gm) was increased from 130 mS/mm to 220 mS/mm, leading to an improvement in gain characteristics. The gate breakdown voltage (BVgd) was improved from 160V for the planar FP-FET to 200V for the recessed FP-FET, resulting from one-order reduction in gm and BVgd, current collapse was suppressed by introducing the recessed-gate structure. At 2GHz, a 32mm-wide recessed FP-FET exhibited an output power of 149 W (4.7W/mm) with 64% power-added efficiency and 8.7 dB linear gain with a drain bias of 47 V.
Keywords :
III-V semiconductors; aluminium compounds; microwave field effect transistors; semiconductor device manufacture; silicon compounds; wide band gap semiconductors; 149 W; 160 V; 2 GHz; 200 V; 47 V; 8.7 dB; AlGaN-GaN; current collapse; field-modulating plate FET; gain characteristics; gate breakdown voltage; recessed-gate structure; transconductance; Aluminum gallium nitride; Electrodes; Etching; FETs; Gallium nitride; Passivation; Plasma measurements; Research and development; Silicon carbide; Silicon compounds;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microwave Symposium Digest, 2004 IEEE MTT-S International
ISSN :
0149-645X
Print_ISBN :
0-7803-8331-1
Type :
conf
DOI :
10.1109/MWSYM.2004.1338819
Filename :
1338819
Link To Document :
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