Title :
Use of high-field electrical testing for SIMOX BOX metrology
Author :
Yoon, June Uk ; Nee, Jocelyn ; Yap, Jee-Hoon ; Chung, James E.
Author_Institution :
Dept. of Mater. Sci. & Eng., MIT, Cambridge, MA, USA
Abstract :
This abstract describes one of the first attempts to apply high-field electrical testing to obtain BOX metrological information previously obtainable only via traditional physical analysis. The advantages of electrical analysis are several: it has a relatively low turn-around time, and provides high-volume statistical information about many BOX characteristics
Keywords :
SIMOX; buried layers; high field effects; materials testing; SIMOX BOX metrology; high-field electrical testing; high-volume statistical information; turn-around time; Capacitors; Density measurement; Electric variables measurement; Electrons; Etching; Information analysis; Materials science and technology; Metrology; Testing; Tunneling;
Conference_Titel :
SOI Conference, 1995. Proceedings., 1995 IEEE International
Conference_Location :
Tucson, AZ
Print_ISBN :
0-7803-2547-8
DOI :
10.1109/SOI.1995.526502
