Title :
Integrated Readout and Control Electronics for a Microelectromechanical Angular Velocity Sensor
Author :
Saukoski, Mikko ; Aaltonen, Lasse ; Halonen, Kari ; Salo, Teemu
Author_Institution :
Electron. Circuit Design Lab., Helsinki Univ. of Technol., Espoo
Abstract :
An ASIC is implemented for readout and control of a bulk micromachined capacitive gyroscope. Both the system architecture and details on the circuitry of different subsystems are presented. Together with digital signal processing on an FPGA chip, a complete working prototype of a microelectromechanical gyroscope is realized and measured. This plusmn100 deg/s gyroscope achieves 0.053 deg/s/yradic(Hz) spot noise and 49.9 dB signal-to-noise ratio over the 36 Hz bandwidth, with plusmn4 % offset stability over the temperature range from -40 to +85 degC. The work shows that a gyroscope can be realized with the chosen architecture, and that good performance can be achieved
Keywords :
angular velocity measurement; application specific integrated circuits; capacitive sensors; detector circuits; digital signal processing chips; field programmable gate arrays; gyroscopes; microsensors; readout electronics; -40 to 85 C; 36 Hz; ASIC; FPGA chip; bulk micromachined capacitive gyroscope; control electronics; digital signal processing; integrated readout electronics; microelectromechanical angular velocity sensor; microelectromechanical gyroscope; Angular velocity; Angular velocity control; Application specific integrated circuits; Circuit noise; Digital signal processing chips; Field programmable gate arrays; Gyroscopes; Prototypes; Semiconductor device measurement; Signal to noise ratio;
Conference_Titel :
Solid-State Circuits Conference, 2006. ESSCIRC 2006. Proceedings of the 32nd European
Conference_Location :
Montreux
Print_ISBN :
1-4244-0303-0
DOI :
10.1109/ESSCIR.2006.307576
