DocumentCode
3491697
Title
Microjet fabrication of micro-optical components
Author
Cox, W.R. ; Chen, T. ; Hayes, D.J. ; MacFarlane, D.L. ; Narayan, V. ; Tatum, J.A.
Author_Institution
MicroFab Technol. Inc., Plano, TX, USA
Volume
1
fYear
1994
fDate
31 Oct-3 Nov 1994
Firstpage
52
Abstract
We describe a data-driven, inkjet-based method for fabricating micro-optical components, such as microlenses and waveguides, by microjet dispensing and placing of microdroplets of optical materials onto optical substrates and optoelectronic components. We also show performance data for microjetted elements, such as arrays of plano-convex lenslets with diameters ranging between 40 and 150μm
Keywords
jets; 40 to 150 micron; arrays; inkjet; micro-optical components; microjet fabrication; microlenses; optical materials; optical substrates; optoelectronic components; plano-convex lenslets; waveguides; Fabrication; Lenses; Microoptics; Optical arrays; Optical microscopy; Optical mixing; Optical polymers; Optical refraction; Printing; Scanning electron microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society Annual Meeting, 1994. LEOS '94 Conference Proceedings. IEEE
Conference_Location
Boston, MA
Print_ISBN
0-7803-1470-0
Type
conf
DOI
10.1109/LEOS.1994.586886
Filename
586886
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