Title :
ESD equivalent circuits and simulations-effects on gate oxide breakdown/degradation
Author :
Yeoh, Teong-San ; Aw, Kean-Hong ; Hu, She-Jer
Author_Institution :
Intel Technol., Penang, Malaysia
Abstract :
ESD protection has been and still is one of the most important considerations in the design of CMOS devices. This is particularly crucial as we shrink transistor dimensions. Knowledge of the ESD pulse in terms of voltage build-up at the transistor gates of internal circuitry is important if we are to eliminate and/or reduce ESD effects on gate oxide breakdown/degradation. In this paper, we describe the modeling of the I/O protection circuitry which is an ESD protection device into equivalent circuits, as seen by a Human Body Model (HBM) ESD pulse. SPICE simulations are also performed
Keywords :
CMOS integrated circuits; MOSFET; SPICE; circuit analysis computing; electric breakdown; electrostatic discharge; equivalent circuits; integrated circuit modelling; protection; CMOS devices; ESD equivalent circuits; ESD protection; ESD pulse; I/O protection circuitry modeling; SPICE simulations; degradation; gate oxide breakdown; human body model; voltage build-up; Biological system modeling; Breakdown voltage; Circuit simulation; Degradation; Electrostatic discharge; Equivalent circuits; Humans; Protection; Pulse circuits; Transistors;
Conference_Titel :
Semiconductor Electronics, 1996. ICSE '96. Proceedings., 1996 IEEE International Conference on
Conference_Location :
Penang
Print_ISBN :
0-7803-3388-8
DOI :
10.1109/SMELEC.1996.616464