Measurement of thickness and optical constants for metallic films used in optoelectronics

Theoretical description and experimental detection of classical dimensional effects in the optical properties of thin metallic films is considered. We modeled and calculated quantitative influence of dimensional effects on dispersion law of refraction and damping coefficients of thin metallic films in wide range of wavelengths. Experiments were conducted on 5-50 nm nickel films obtained by thermal deposition. Laser ellipsometers with wavelengths of 632.8 nm and 488.2 nm were used for optical measurements. In addition, ellipsometric method for film thickness measurement is described. The method takes into account oxide layers on the surface of metals and estimates variation of optical parameters on the measurement. The method was applied to nickel and titanium films.