Title :
Application of capacitive displacement sensor on Joule Balance
Author :
Yunfeng, Lu ; He, Q. ; Zhao, J.
Author_Institution :
Nat. Inst. of Metrol., Beijing, China
Abstract :
This paper gives a high precision capacitive displacement sensor design which is applied in the Joule Balance proposed by NIM, China. The plate of sensor is made by non-magnetic material, and is for the Joule Balance special use. The distance of the capacitive displacement sensor reaches to 1mm. And the resolution is less than 0.019μm full scale, in part range of the full scale, this data will be far less.
Keywords :
capacitive sensors; displacement measurement; China; NIM; capacitive displacement sensor design; distance 1 mm; joule balance; nonmagnetic material; Capacitance measurement; Capacitive sensors; Coils; Displacement measurement; Integrated circuit measurements; Magnetic sensors; Parasitic capacitance; Position measurement; Semiconductor device measurement; Sensor phenomena and characterization;
Conference_Titel :
Precision Electromagnetic Measurements (CPEM), 2010 Conference on
Conference_Location :
Daejeon
Print_ISBN :
978-1-4244-6795-2
DOI :
10.1109/CPEM.2010.5545281
