Packaging of integrated micro optical systems

Wafer scale manufacturing techniques for making both multi-phase level diffractive optics and micro refractive optics feature low manufacturing cost, compact size, and light weight. The integration of the micro optics with lasers, detectors, and optical waveguides enables many new applications where size, weight, and cost are crucial. In this paper, we will report our results on the integrated micro optical systems (IMOS) which contain VCSEL array, detector array, edge emitting lasers, and fiber array for opto-electronic and fiber optic applications