Title :
Characterization of thin ferroelectric films for tunable microwave devices - result analysis according to the PLD deposit conditions
Author :
Seaux, J.F. ; Cros, D. ; Madrangeas, V. ; Delage, T. ; Champeaux, C. ; Catherinot, A.
Author_Institution :
IRCOM, UMR CNRS, Limoges, France
Abstract :
Thin film barium strontium titanate (BST) has been investigated for over ten years because of their important dielectric constant which depends on the BST composition (Ba/Sr ratio and Ti composition), the temperature of the device and DC bias voltage applied. We have developed a measurement technique to determine the dielectric constant and the loss tangent of BST thin film at 12 GHz. The deposit conditions by laser ablation (PLD) have been optimized to obtain a good crystallographic and dielectric properties. The objective then is to design reconfigurable microwave devices based on ferroelectric films.
Keywords :
barium compounds; dielectric properties; ferroelectric thin films; microwave devices; pulsed laser deposition; 12 GHz; BST composition; BST thin film; Ba/Sr ratio; BaSrTiO3; DC bias voltage; PLD deposit conditions; Ti composition; barium strontium titanate; crystallographic properties; dielectric constant; dielectric properties; laser ablation; loss tangent; reconfigurable microwave devices; thin ferroelectric films; tunable microwave devices; Barium; Binary search trees; Dielectric constant; Dielectric thin films; Ferroelectric films; Microwave devices; Strontium; Thin film devices; Titanium compounds; Tunable circuits and devices;
Conference_Titel :
Microwave Symposium Digest, 2004 IEEE MTT-S International
Print_ISBN :
0-7803-8331-1
DOI :
10.1109/MWSYM.2004.1338983
