Title :
Long wavelength VCSEL with tunnel junction and metamorphic AlAs/GaAs conductive DBR
Author :
Starck, Christophe
Author_Institution :
Alcatel Alsthom Recherche, Marcoussis, France
Abstract :
Presents a novel VCSEL design which is monolithic, planar and combines the advantages of AlAs/GaAs DBRs and InP based active layers. The structure consists basically in the use of an active cavity sandwiched between two n doped semiconductor reflectors. A reverse biased n++/p++ tunnel junction is used for the hole injection in the p region of the gain medium. The top mirror is based on GaAs/AlAs metamorphic layers directly grown on the InP active cavity in a 2" compatible process. Current localization is achieved thanks to a simple proton implantation step that destroys locally the electrical conduction in the tunnel junction. Thermal, electrical and optical properties of n type binary GaAs/AlAs mirrors are therefore fully exploited in this simple design
Keywords :
III-V semiconductors; aluminium compounds; chemical beam epitaxial growth; distributed Bragg reflector lasers; gallium arsenide; indium compounds; ion implantation; laser beams; laser cavity resonators; laser mirrors; semiconductor lasers; surface emitting lasers; 1.3 mum; 1.55 mum; AlAs-GaAs; AlAs/GaAs; AlAs/GaAs DBRs; GaAs/AlAs metamorphic layers; GaAs/AlAs mirrors; InP; InP active cavity; InP based active layers; VCSEL design; active cavity; current localization; electrical conduction; electrical properties; gain medium; hole injection; long wavelength VCSEL; metamorphic conductive DBR; mirror; monolithic planar design; n doped semiconductor reflectors; optical properties; p region; proton implantation step; reverse biased n++/p++ tunnel junction; simple design; thermal properties; tunnel junction; Distributed Bragg reflectors; Gallium arsenide; Indium phosphide; Mirrors; Optical buffering; Optical pumping; Optical refraction; Optical variables control; Temperature; Vertical cavity surface emitting lasers;
Conference_Titel :
LEOS '99. IEEE Lasers and Electro-Optics Society 1999 12th Annual Meeting
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-5634-9
DOI :
10.1109/LEOS.1999.813516
