Title :
Electrical breakdown and electroluminescence in tantalum pentoxide films
Author_Institution :
Shinshu Univ., Nagano, Japan
Abstract :
The author investigated electric breakdown and electroluminescence at high field in Ta2O5 thin films obtained by anodizing Ta foils and films sputtered in an argon plasma. The electroluminescence manifests a strong dependence on electric field, but weak dependence on temperature. Electroluminescence in the high-field region near the breakdown is associated with electron avalanche by injected electrons from the electrode. The spectrum of the emitted light has a peak at 600 nm
Keywords :
anodised layers; electric breakdown of solids; electroluminescence; electronic conduction in insulating thin films; luminescence of inorganic solids; sputtered coatings; tantalum compounds; 600 nm; Ta2O5 thin films; electric breakdown; electric field; electroluminescence; electron avalanche; high field; spectrum; temperature; Argon; Avalanche breakdown; Electric breakdown; Electrodes; Electroluminescence; Electroluminescent devices; Electrons; Plasma temperature; Sputtering; Temperature dependence;
Conference_Titel :
Electrical Insulation and Dielectric Phenomena, 1988. Annual Report., Conference on
Conference_Location :
Ottawa, Ont.
DOI :
10.1109/CEIDP.1988.26332
