Title :
Large tuning range analog and multi-bit MEMS varactors
Author :
Muldavin, Jeremy ; Bozler, Carl ; Rabe, Steve ; Keast, Craig
Author_Institution :
MIT Lincoln Lab., MIT, Lexington, MA, USA
Abstract :
This paper presents a variety of analog and multi-bit RF MEMS varactors for use in tunable circuits and filters. Novel use of multiple pull-down electrodes covered with thick dielectrics allow for analog and digital-type control and long-hold down times. An analog varactor with nearly 7:1 usable tuning range and better than 80:1 switching range, a multi-state varactor-switch and a 4 bit capacitor bank are presented.
Keywords :
S-parameters; circuit tuning; microswitches; varactors; analog MEMS varactors; analog control; capacitor bank; digital-type control; long-hold down times; multibit MEMS varactors; multiple pull-down electrodes; multistate varactor-switch; switching range; thick dielectrics; tunable circuits; tunable filters; tuning range; Circuit optimization; Dielectrics; Digital control; Electrodes; Filters; Micromechanical devices; Radiofrequency microelectromechanical systems; Thickness control; Tunable circuits and devices; Varactors;
Conference_Titel :
Microwave Symposium Digest, 2004 IEEE MTT-S International
Print_ISBN :
0-7803-8331-1
DOI :
10.1109/MWSYM.2004.1338984
