Title :
Asperity heating for repair of metal contact RF MEMS switches
Author :
Jensen, Brian D. ; Huang, Kuangwei ; Chow, Linda ; Saitou, Kazuhiro ; Volakis, John L. ; Kurabayashi, Katsuo
Author_Institution :
Dept. of Mech. Eng., Michigan Univ., Ann Arbor, MI, USA
Abstract :
We have experimentally observed the failure of metal contact RF MEMS switches due to a rapid rise in contact resistance during switching. We were able to repair the failed switches through heating the contact asperities by applying sufficient contact voltage. The data suggest the hypothesis that increasing contact resistance is caused by strain hardening of the contact surface. With this understanding, appropriate corrective measures can be taken to overcome failure, and suggestions for doing so are given in the paper.
Keywords :
contact resistance; electrical contacts; failure analysis; microswitches; radiofrequency integrated circuits; reliability; RF MEMS switch reliability; contact asperity heating; contact resistance; contact surface; contact voltage application; metal contact failure; metal contact repair; strain hardening; switch repair; switching; Contact resistance; Electrical resistance measurement; Electrodes; Gold; Heating; Radiofrequency microelectromechanical systems; Switches; Temperature sensors; Testing; Voltage;
Conference_Titel :
Microwave Symposium Digest, 2004 IEEE MTT-S International
Print_ISBN :
0-7803-8331-1
DOI :
10.1109/MWSYM.2004.1338989
