DocumentCode
349313
Title
On the use of tin oxide for metal-dielectric mirrors with strong adhesion
Author
Goossen, K.W. ; Knox, W.H.
Author_Institution
Lucent Technol., Bell Labs., Holmdel, NJ, USA
Volume
1
fYear
1999
fDate
1999
Firstpage
171
Abstract
Many optical devices, but particularly vertical-cavity surface emitting lasers (VCSEL´s), require high reflectivity mirrors. These mirrors are typically stacks of quarter-wavelength thick layers (as measured in the material), of alternating high and low index layers, placed on the device either by epitaxial techniques, or by dielectric deposition techniques such as evaporation. For bottom emitters, the thickness of these mirrors can be greatly reduced by capping the stack with a low optical loss metal (the thickness of the last dielectric layer would be adjusted for optical phase matching)
Keywords
adhesion; laser cavity resonators; laser mirrors; optical losses; optical phase matching; reflectivity; semiconductor lasers; surface emitting lasers; SnO2; VCSEL; dielectric deposition techniques; epitaxial techniques; high reflectivity mirrors; last dielectric layer; low optical loss metal; metal-dielectric semiconductor laser mirrors; optical phase matching; quarter-wavelength thick layers; strong adhesion; vertical-cavity surface emitting lasers; Dielectric losses; Dielectric measurements; Mirrors; Optical devices; Reflectivity; Stimulated emission; Surface emitting lasers; Thickness measurement; Tin; Vertical cavity surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
LEOS '99. IEEE Lasers and Electro-Optics Society 1999 12th Annual Meeting
Conference_Location
San Francisco, CA
ISSN
1092-8081
Print_ISBN
0-7803-5634-9
Type
conf
DOI
10.1109/LEOS.1999.813533
Filename
813533
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