Title :
Development of Flexible Neural Microelectode Arrays Based on Parylene for Retinal Prosthesis
Author :
Xing, Yumei ; Chun Hui ; Wu, Yibo ; Xu, Ailan ; Li, Gang ; Zhao, Jianlong ; Ren, Qiushi
Author_Institution :
Shanghai Jiaotong Univ., Shanghai
Abstract :
Microelectrode arrays (MEAs) have become key components in retinal implants for recording of neural signals or electrical stimulation of nerves. In this paper, implantable flexible MEAs based on a novel polymer, parylene, were developed by designing MEMS process. And electrical performance of prepared microelectrodes was characterized electrochemically. Results showed that impedance and phase delay of testing MEAs were 2000 Omega~100 Omega and -20deg from 103 Hz to 105 Hz, respectively, which would supply a better application with neural interface for retinal prosthesis.
Keywords :
eye; microelectrodes; prosthetics; MEMS process; electrical stimulation; flexible neural microelectode arrays; neural signals; parylene; polymer; retinal implants; retinal prosthesis; Electrical stimulation; Impedance; Implants; Microelectrodes; Micromechanical devices; Neural microtechnology; Neural prosthesis; Polymers; Process design; Retina; Flexible substrates; MEMS; Microelectrode arrays; Parylene; Retinal prosthesis;
Conference_Titel :
Networking, Sensing and Control, 2008. ICNSC 2008. IEEE International Conference on
Conference_Location :
Sanya
Print_ISBN :
978-1-4244-1685-1
Electronic_ISBN :
978-1-4244-1686-8
DOI :
10.1109/ICNSC.2008.4525278
