Title :
Modeling of a CMOS Convective Accelerometer for HDL integration
Author :
Leman, O. ; Chaehoi, A. ; Mailly, F. ; Latorre, L. ; Nouet, P.
Author_Institution :
Univ. Montpellier II
Abstract :
This paper introduces an analytical modeling of a convection heat CMOS accelerometer. The modeling approach relies on the use of fundamental results and is validated using both experimental data issued from test vehicles and FEM analysis. Since such accelerometers are based on the CMOS technology, the proposed model is intended for further HDL integration. The objective is to enable system level simulation and optimization within standard microelectronic CAD software
Keywords :
CMOS integrated circuits; accelerometers; finite element analysis; hardware description languages; micromachining; CMOS technology; HDL integration; convection heat CMOS accelerometer; standard microelectronic CAD software; system level simulation; Accelerometers; Bridge circuits; CMOS technology; Detectors; Hardware design languages; Heat transfer; Heating; Resistors; Semiconductor device modeling; Temperature sensors;
Conference_Titel :
Solid-State Device Research Conference, 2006. ESSDERC 2006. Proceeding of the 36th European
Conference_Location :
Montreux
Print_ISBN :
1-4244-0301-4
DOI :
10.1109/ESSDER.2006.307656
